Yu, S., & Xiao, H. (2008). Fabrication and characterization of mesoporous dielectric materials for ULSI interconnect applications.
Chicago Style CitationYu, Suzhu, and Hu Xiao. Fabrication and Characterization of Mesoporous Dielectric Materials for ULSI Interconnect Applications. 2008.
MLA引文Yu, Suzhu, and Hu Xiao. Fabrication and Characterization of Mesoporous Dielectric Materials for ULSI Interconnect Applications. 2008.
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