Yu, S., & Xiao, H. (2008). Fabrication and characterization of mesoporous dielectric materials for ULSI interconnect applications.
Chicago Style CitationYu, Suzhu, and Hu Xiao. Fabrication and Characterization of Mesoporous Dielectric Materials for ULSI Interconnect Applications. 2008.
MLA CitationYu, Suzhu, and Hu Xiao. Fabrication and Characterization of Mesoporous Dielectric Materials for ULSI Interconnect Applications. 2008.
Warning: These citations may not always be 100% accurate.