Parylene as a dielectric layer in a field effect transistor (FET)
The objective of this project is to develop the parylene coating system for transistor dielectric application in Crystal Growth Lab. This will include the optimization of parameters so that good quality parylene films can be deposited. Experiments will be conducted to determine the relationship betw...
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| Format: | Final Year Project |
| Language: | English |
| Published: |
2010
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| Online Access: | http://hdl.handle.net/10356/42451 |
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| Institution: | Nanyang Technological University |
| Language: | English |