A bimetallic thin film actuated micro liquid delivery system (LDS)
As advances in micromachining technology have been made in recent years, a variety of movable, free-standing novel structures and devices have been developed. In addition to research based on micromotors and other actuators, micro delivery systems for liquids and gases have also been targeted as one...
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| Format: | Theses and Dissertations |
| Language: | English |
| Published: |
2011
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| Online Access: | http://hdl.handle.net/10356/42773 |
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| Institution: | Nanyang Technological University |
| Language: | English |