Laser annealing of semiconductor materials for future electron device application

• 主要作者: Ong, Chio Yin.
• 其他作者: Pey Kin Leong
• 格式: Theses and Dissertations
• 語言: English
• 出版: 2011
• 主題: DRNTU::Engineering::Electrical and electronic engineering::Semiconductors; DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
• 在線閱讀: http://hdl.handle.net/10356/43999
• 機構: Nanyang Technological University

Laser annealing (LA) is an emerging technique that has the potential to be incorporated into the device fabrication process in the near future. The unique characteristics of LA that are not found in the conventional thermal annealing methods have gained substantial attraction for applications to the...