APA Citation

Koo, C. K., & Yuan, L. X. (2008). Application of phase shift masking to sub-0.13 micron lithography.

Chicago Style Citation

Koo, Chee Kiong., and Larry X.-C Yuan. Application of Phase Shift Masking to Sub-0.13 Micron Lithography. 2008.

MLA Citation

Koo, Chee Kiong., and Larry X.-C Yuan. Application of Phase Shift Masking to Sub-0.13 Micron Lithography. 2008.

Warning: These citations may not always be 100% accurate.