High performance nano-scale measurements by advanced atomic force estimation

• Main Author: Cui, Song
• Other Authors: Lim Ser Yong
• Format: Theses and Dissertations
• Language: English
• Published: 2011
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics
• Online Access: https://hdl.handle.net/10356/46322
• Institution: Nanyang Technological University

Atomic force microscopy (AFM) was invented by G. Binnig and his collaborators in 1986 after the invention of scanning tunnelling microscopy (STM) in the early 1980s. The AFM system deploys a tiny probe to interact with the sample such that topography information of the sample can be obtained. The re...