Design and fabrication of micromachined RF switches and integrated switching circuits

240 p.

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Bibliographic Details
Main Author:	Tang, Min
Other Authors:	Liu Ai Qun
Format:	Theses and Dissertations
Published:	2011
Subjects:	DRNTU::Engineering::Electrical and electronic engineering
Online Access:	https://hdl.handle.net/10356/46940
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Institution:	Nanyang Technological University

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spelling	sg-ntu-dr.10356-469402023-07-04T16:18:03Z Design and fabrication of micromachined RF switches and integrated switching circuits Tang, Min Liu Ai Qun School of Electrical and Electronic Engineering Positioning and Wireless Technology Centre DRNTU::Engineering::Electrical and electronic engineering 240 p. This thesis presents a new type of lateral switches and switching circuits for high frequency applications fabricated by a single-mask substrate transfer process. The lateral RF MEMS switch consists of silicon-core coplanar waveguide (CPW) transmission line and a cantilever-beam electrostatic actuator. The movable part is a highaspect-ratio silicon (Si) cantilever beam coated by metal. The electromagnetic modeling and design as well as mechanical modeling and design are depicted in detail. Both the RF response and the mechanical behaviour are verified by extensive experiments. The switch shows an insertion loss of below 1 dB at 50 MHz - 25 GHz. Both return loss and isolation are higher than 20 dB. The switching speed is 35 us. The life span is more than one million switching cycles. DOCTOR OF PHILOSOPHY (EEE) 2011-12-27T05:47:58Z 2011-12-27T05:47:58Z 2007 2007 Thesis Tang, M. (2007). Design and fabrication of micromachined RF switches and integrated switching circuits. Doctoral thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/46940 10.32657/10356/46940 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering Tang, Min Design and fabrication of micromachined RF switches and integrated switching circuits
description	240 p.
author2	Liu Ai Qun
author_facet	Liu Ai Qun Tang, Min
format	Theses and Dissertations
author	Tang, Min
author_sort	Tang, Min
title	Design and fabrication of micromachined RF switches and integrated switching circuits
title_short	Design and fabrication of micromachined RF switches and integrated switching circuits
title_full	Design and fabrication of micromachined RF switches and integrated switching circuits
title_fullStr	Design and fabrication of micromachined RF switches and integrated switching circuits
title_full_unstemmed	Design and fabrication of micromachined RF switches and integrated switching circuits
title_sort	design and fabrication of micromachined rf switches and integrated switching circuits
publishDate	2011
url	https://hdl.handle.net/10356/46940
_version_	1772828752782295040

Design and fabrication of micromachined RF switches and integrated switching circuits

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