A theoretical and experimental study of piezoelectric microdiaphragm platforms for physical and biological sensing
This thesis reports theoretical and experimental study of piezoelectric microdiaphragm platform for physical and biological sensing. The microdiaphragms were first designed and then fabricated by MEMS fabrication processes. Their different characteristics such as frequency behavior, mode shapes, cou...
Saved in:
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Theses and Dissertations |
| Language: | English |
| Published: |
2012
|
| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/47725 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Nanyang Technological University |
| Language: | English |
Be the first to leave a comment!