A theoretical and experimental study of piezoelectric microdiaphragm platforms for physical and biological sensing

• المؤلف الرئيسي: Mohammad Olfatnia
• مؤلفون آخرون: Miao Jianmin
• التنسيق: Theses and Dissertations
• اللغة: English
• منشور في: 2012
• الموضوعات: DRNTU::Engineering::Mechanical engineering::Mechanics and dynamics
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/47725

This thesis reports theoretical and experimental study of piezoelectric microdiaphragm platform for physical and biological sensing. The microdiaphragms were first designed and then fabricated by MEMS fabrication processes. Their different characteristics such as frequency behavior, mode shapes, cou...