Design, fabrication and experimental characterization of a PDMS-based AWG spectrometer
In this thesis, PDMS-based AWG microspectrometer for LOC application was demonstrated by foremost developing planar waveguide in PDMS material. The development of planar waveguide focused primarily in design and fabrication of novel PDMS waveguide with single-mode propagation as the basic b...
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Format: | Theses and Dissertations |
Language: | English |
Published: |
2012
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Online Access: | https://hdl.handle.net/10356/48374 |
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Institution: | Nanyang Technological University |
Language: | English |
Summary: | In this thesis, PDMS-based AWG microspectrometer for LOC application
was demonstrated by foremost developing planar waveguide in PDMS material.
The development of planar waveguide focused primarily in design and fabrication
of novel PDMS waveguide with single-mode propagation as the basic building
block for complex devices. By selecting the appropriate geometrical parameters,
single-mode propagation can be generated even in a large cross section PDMS rib
waveguide (> 5 μm). The fabrication of PDMS single-mode waveguide involved
precise controlled of the slab and rib height to the accuracy of ±0.1 μm as well as
the modification of the refractive index from 1.408 to 1.429. The characterization
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of the PDMS waveguide corroborated single-mode propagation at the wavelength
of 635 nm with the propagation loss measured to be 0.48 dB/cm for low refractive
index contrast waveguides (Δ=0.07%) and 0.2 dB/cm for high refractive index
contrast waveguides (Δ=1.18%). |
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