Design of miniaturized inertia measurement unit

• Main Author: Yuan, Weiming.
• Other Authors: Li King Ho Holden
• Format: Final Year Project
• Language: English
• Published: 2012
• Subjects: DRNTU::Engineering::Mechanical engineering
• Online Access: http://hdl.handle.net/10356/49361
• Institution: Nanyang Technological University

Micro-machined electromechanical systems (MEMS) industry has seen rapid development and gained wide popularity. A particular segment which has exceptional growth is in the field of inertial MEMs. This is due to the integration of sensors into daily consumer products like cell phones, cameras and even gaming consoles. The market is estimated to worth billions of dollars. As demand and development of inertial MEMS continue to prosper, MEMS device testing did not see a proportional growth, other than manufacturer's in-house setups. This was due to the lack of interest and understanding in the area. A study conducted for MEMS testing confirmed that there was a lack of standards and protocol for MEMS testing. However, testing equipment for MEMS testing has seen great improvement and advancement, with companies offering advance testing units which can be highly customized. A new concept of testing equipment rental and services was also identified.