Fabrication of carbon nanotube field effect transistors by transferring carbon nanotubes from growth substrate to device substrate

• Main Author: Mathews, Martin Paul.
• Other Authors: Zhang Qing
• Format: Final Year Project
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Electrical and electronic engineering
• Online Access: http://hdl.handle.net/10356/50990
• Institution: Nanyang Technological University

Single wall carbon nanotubes (SWNTs) are grown on quartz or silicon substrates using chemical vapor deposition technique. Electron beam evaporation forms a thin layer of gold (100nm) on the SWNTs on the growth substrates (quartz or silicon). The SWNTs and gold layer can be transferred to device subs...