A tactical grade MEMS gyroscope

• Main Author: Tan, Justin Yuda.
• Other Authors: Poenar Daniel Puiu
• Format: Final Year Project
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering
• Online Access: http://hdl.handle.net/10356/54207
• Institution: Nanyang Technological University

This report illustrates the research project of a tactical grade Micro Electrical Mechanical Systems (MEMS) gyroscope through simulation and presents the results of the data. The gyroscope is used to measure the angular rotation and around their sensitive axes. MEMS gyroscope uses the Corolis effect to measure the angular rate. This technology is growing and it is being used in many applications such as image stabilisation in digital cameras, tacking the orientation when GPS signal is lost and ect. The objective of this project is to develop ideas and moderate performance gyroscope using MEMS micro fabrications which will improve the current performance of all existing MEMS gyroscopes. The result of this research carries out aims to increase the Quality-effective Factor, Resonant Frequency and low Brownian Noise Floor of the MEMS gyroscope. With an improve quality factor, the gyroscope will be more accurate. By exploring the design of the tuning fork gyroscope, a decision will be made to best satisfy the requirements of this project. With the design in mind, the report will illustrate the process of getting a improved MEMS through the use of a Conventorware Architect software. The Conventorware Architect software has shown how we achieved the target specifications in both Quality Factor and Resonant Frequency.