Preventing the dry running/damage of a water recirculation pump

• Main Author: Cao, Lei
• Other Authors: Wang Youyi
• Format: Final Year Project
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Power electronics
• Online Access: http://hdl.handle.net/10356/54584
• Institution: Nanyang Technological University

In hard disc or media manufacturing industry, the processes of making discs are done through elaborate ways. This thesis is focused on one of the processes which called WASH process. In this process, the machine we used is called Oliver 2000, it has several tanks and other components, each tank can be considered as a cleaning tank system. We will be discussing about the tank system only. The tank we used in the cleaning tank system is normally used in semiconductor manufacturing fields and other areas of electronic industry where efficient cleaning of the electronic products is needed. There is a water recirculation pump in order to recirculate the water of the tank system. The water in the tank is mixed with hazardous chemical which is harmful to human. We have encountered the recirculation error and pump leak a lot of times. And it is dangerous to those people who work with. So pump leaks and pressure bursts must be avoided.