Development of aligned carbon nanotubes for interconnects applications

• المؤلف الرئيسي: Lu, Jingyu.
• مؤلفون آخرون: Miao Jianmin
• التنسيق: Theses and Dissertations
• اللغة: English
• منشور في: 2013
• الموضوعات: DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems; DRNTU::Engineering::Materials::Nanostructured materials
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/54749

The demand for faster, cheaper, more compact and multifunctional electronic products has been pushing the dimensions of transistors and interconnects towards the physical limit, various problems arise to threaten the reliability of conventional copper interconnects, including the limited current car...