Development of aligned carbon nanotubes for interconnects applications

• Main Author: Lu, Jingyu.
• Other Authors: Miao Jianmin
• Format: Theses and Dissertations
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems; DRNTU::Engineering::Materials::Nanostructured materials
• Online Access: http://hdl.handle.net/10356/54749
• Institution: Nanyang Technological University

The demand for faster, cheaper, more compact and multifunctional electronic products has been pushing the dimensions of transistors and interconnects towards the physical limit, various problems arise to threaten the reliability of conventional copper interconnects, including the limited current car...