System identification for RTPCVD process
Semiconductor manufacturing industry is pursuing a higher degree of automation recently. However, currently the supervisory control of nitride process is based on experts' experiences and manual works. Although there are multiple control schemes that can be implemented to the process, due to th...
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| Format: | Theses and Dissertations |
| Language: | English |
| Published: |
2014
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| Online Access: | http://hdl.handle.net/10356/55252 |
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| Institution: | Nanyang Technological University |
| Language: | English |