Implementation of optical character recognition (OCR) module on semiconductor etching tools for wafer tracking

This dissertation presents a brief introduction to the semiconductor industry and elaborates the implementation of a typical optical character recognition (OCR) module on one particular processing type of semiconductor processing tool, namely the etching tool. The OCR module was implemented to assis...

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Bibliographic Details
Main Author:	Lai, Yeu Kwong
Other Authors:	Lim, Lennie Enk Ng
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Manufacturing
Online Access:	http://hdl.handle.net/10356/5924
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-5924
record_format	dspace
spelling	sg-ntu-dr.10356-59242023-03-11T16:54:21Z Implementation of optical character recognition (OCR) module on semiconductor etching tools for wafer tracking Lai, Yeu Kwong Lim, Lennie Enk Ng School of Mechanical and Aerospace Engineering DRNTU::Engineering::Manufacturing This dissertation presents a brief introduction to the semiconductor industry and elaborates the implementation of a typical optical character recognition (OCR) module on one particular processing type of semiconductor processing tool, namely the etching tool. The OCR module was implemented to assist the semiconductor wafer fabrication (Fab) to perform wafer tracking in the factory, which can help to speed up the process of finding a process problem down the line. Master of Science (Computer Integrated Manufacturing) 2008-09-17T11:02:30Z 2008-09-17T11:02:30Z 2005 2005 Thesis http://hdl.handle.net/10356/5924 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Manufacturing
spellingShingle	DRNTU::Engineering::Manufacturing Lai, Yeu Kwong Implementation of optical character recognition (OCR) module on semiconductor etching tools for wafer tracking
description	This dissertation presents a brief introduction to the semiconductor industry and elaborates the implementation of a typical optical character recognition (OCR) module on one particular processing type of semiconductor processing tool, namely the etching tool. The OCR module was implemented to assist the semiconductor wafer fabrication (Fab) to perform wafer tracking in the factory, which can help to speed up the process of finding a process problem down the line.
author2	Lim, Lennie Enk Ng
author_facet	Lim, Lennie Enk Ng Lai, Yeu Kwong
format	Theses and Dissertations
author	Lai, Yeu Kwong
author_sort	Lai, Yeu Kwong
title	Implementation of optical character recognition (OCR) module on semiconductor etching tools for wafer tracking
title_short	Implementation of optical character recognition (OCR) module on semiconductor etching tools for wafer tracking
title_full	Implementation of optical character recognition (OCR) module on semiconductor etching tools for wafer tracking
title_fullStr	Implementation of optical character recognition (OCR) module on semiconductor etching tools for wafer tracking
title_full_unstemmed	Implementation of optical character recognition (OCR) module on semiconductor etching tools for wafer tracking
title_sort	implementation of optical character recognition (ocr) module on semiconductor etching tools for wafer tracking
publishDate	2008
url	http://hdl.handle.net/10356/5924
_version_	1761781666079047680

Implementation of optical character recognition (OCR) module on semiconductor etching tools for wafer tracking

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