Methodological, conceptual design and prototype of a reconfigurable semiconductor equipment ARAM (Automated Reliability, Availability, and Maintainability) system generator

• Main Author: Lee, Shaw Long.
• Other Authors: Goh, Kiah Mok
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Manufacturing::Flexible manufacturing systems
• Online Access: http://hdl.handle.net/10356/5944
• Institution: Nanyang Technological University

Semiconductor companies are operating in a highly demanding environment where equipment has drastic movements. Companies are facing difficulties in maintaining and tracking these movements. To solve this problem, one of the solutions is to use Automated Reliability, Availability and Maintainability (ARAM) system generator, which is a program that uses a single input data source, be it a file or database schema, to generate the new changes for different systems automatically and simultaneously. This dissertation covers the author's research on current methodologies and designs for re-configurable software generator framework. It discusses the concept of the re-configurable ARAM system generator. The conceptual design of ARAM system generator covers Equipment Data Acquisition, Equipment Adaptor, Data Adaptor, and Equipment Status Tracking System. Besides these, various programming technologies and Graphical User Interface tools are evaluated for the usage by ARAM system generator and Equipment Status Tracking respectively.