Investigation of micro-EDM controllable factors on machined silicon surface quality

• Main Author: Nachiappan Ravi
• Other Authors: Yeo, Swee Hock
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Manufacturing::Product engineering
• Online Access: http://hdl.handle.net/10356/6175
• Institution: Nanyang Technological University

The present study examines the effect of interaction of micro-EDM controllable factors such as discharge-energy, traverse speed and feed rate on the surface integrity with p-type boron-doped silicon. The average surface roughness is quantitatively correlated to input discharge-energy. Further an empirical relationship was computed between the average surface roughness and area fraction of voids. Next, a DOE (Design of Experiment) technique is adopted to describe specifically the interaction effect of the input controllable factors such as traverse speed and feed rate on the average surface roughness. Subsequently, a second order polynomial model that can adequately describe the relationship between the same is found.