Effect of substrate tilt angle on morphological, structural and optical properties of Zinc Oxide thin film

This paper studies the morphological, structural and optical properties of zinc oxide thin film sputtered at different substrate tilt angle. These thin films were grown using radio frequency magnetron sputtering and characterised by scanning electron microscope, X-ray diffraction and ultraviolet-vis...

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Bibliographic Details
Main Author: Lee, Benjamin Kun Ze
Other Authors: Du Hejun
Format: Final Year Project
Language:English
Published: 2015
Subjects:
Online Access:http://hdl.handle.net/10356/64056
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Institution: Nanyang Technological University
Language: English