Boron removal from CEDI reject for water recycling

• Main Author: Kua, Han Wee
• Other Authors: Ng Wun Jern
• Format: Final Year Project
• Language: English
• Published: 2016
• Subjects: DRNTU::Engineering
• Online Access: http://hdl.handle.net/10356/68166
• Institution: Nanyang Technological University

In the semiconductor industry, a large amount of water is used to rinse and clean and in wet processing, during which semiconductor devices are repeatedly dipped, immersed, or sprayed with solutions. Ultrapure water (UPW) is commonly used to minimize the risk of contamination, which is an essential...