Boron removal from CEDI reject for water recycling
In the semiconductor industry, a large amount of water is used to rinse and clean and in wet processing, during which semiconductor devices are repeatedly dipped, immersed, or sprayed with solutions. Ultrapure water (UPW) is commonly used to minimize the risk of contamination, which is an essential...
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| 主要作者: | |
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| 其他作者: | |
| 格式: | Final Year Project |
| 語言: | English |
| 出版: |
2016
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| 主題: | |
| 在線閱讀: | http://hdl.handle.net/10356/68166 |
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| 機構: | Nanyang Technological University |
| 語言: | English |