Development of a micro-accretion process for three dimensional structures

• Main Author: Yeo, Swee Hock.
• Other Authors: School of Mechanical and Production Engineering
• Format: Research Report
• Published: 2008
• Subjects: DRNTU::Engineering::Mechanical engineering::Machine design and construction
• Online Access: http://hdl.handle.net/10356/6916
• Institution: Nanyang Technological University

The development of microsystem technology has initiated various types of microfabrication processes. These processes in turn serve as a platform for the development of new improved processes with increasingly higher fabrication resolution, This work reports on an investigative study on Localized Ele...