Micro-systems mechanics VOLUME II
Including: 3 parts. TiNi thin films have attracted much attention in recent years as intelligent and functional materials because of their unique properties. TiNi thin film based micro-actuators will become the actuator of choice in many aspects in the rapidly growing field of micro-electro-mechanic...
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Main Authors: | , |
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Format: | Research Report |
Published: |
2008
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Subjects: | |
Online Access: | http://hdl.handle.net/10356/6989 |
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Institution: | Nanyang Technological University |
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