Dual mode acoustic wave sensor for precise pressure reading

• Main Authors: Mu, Xiaojing, Kropelnicki, Piotr, Wang, Yong, Randles, Andrew Benson, Chai, Kevin Tshun Chuan, Gu, Yuan Dong, Cai, H.
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2015
• Subjects: Surface acoustic waves; Acoustic sensing; High pressure; Pressure measurement; Sound pressure
• Online Access: https://hdl.handle.net/10356/81198; http://hdl.handle.net/10220/39208
• Institution: Nanyang Technological University

In this letter, a Microelectromechanical system acoustic wave sensor, which has a dual mode (lateral field exited Lamb wave mode and surface acoustic wave (SAW) mode) behavior, is presented for precious pressure change read out. Comb-like interdigital structured electrodes on top of piezoelectric ma...