Highly sensitive Mach–Zehnder interferometer biosensor based on silicon nitride slot waveguide

• Main Authors: Liu, Qing, Tu, Xiaoguang, Kim, Kyung Woo, Kee, Jack Sheng, Shin, Yong, Han, Kyungsup, Yoon, Yong-Jin, Lo, Guo-Qiang, Park, Mi Kyoung
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2016
• Subjects: Mach–Zehnder interferometer; Silicon nitride waveguide
• Online Access: https://hdl.handle.net/10356/82022; http://hdl.handle.net/10220/41102
• Institution: Nanyang Technological University

We demonstrate a highly sensitive label-free Mach–Zehnder interferometer (MZI) biosensor based on silicon nitride slot waveguide. Unlike the conventional MZI sensors, the sensing arm of the sensor consists of a slot waveguide while the reference arm consists of a strip waveguide. Thanks to the slot...