On-chip spectrometer : design, fabrication and experiment

• Main Author: Zheng, Shaonan
• Other Authors: Liu Aiqun
• Format: Theses and Dissertations
• Language: English
• Published: 2019
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
• Online Access: https://hdl.handle.net/10356/83266; http://hdl.handle.net/10220/48013
• Institution: Nanyang Technological University

This doctorate thesis focuses on the design, fabrication and experimental characterization of novel on-chip spectrometers based on the photonic integrated circuits platform. Specifically, two different types of on-chip spectrometer have been demonstrated. Fabrication processes based on nano-silicon-...