Active MEMS metamaterials for THz bandwidth control

We experimentally demonstrate a microelectromechanical system (MEMS) based metamaterial with actively tunable resonance bandwidth characteristics, operating in the terahertz (THz) spectral region. The broadband resonance characteristic feature of the MEMS metamaterial is achieved by integrating sixt...

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Main Authors: Shih, Kailing, Pitchappa, Prakash, Manjappa, Manukumara, Ho, Chong Pei, Singh, Ranjan, Yang, Bin, Singh, Navab, Lee, Chengkuo
Other Authors: School of Physical and Mathematical Sciences
Format: Article
Language:English
Published: 2017
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Online Access:https://hdl.handle.net/10356/83270
http://hdl.handle.net/10220/42514
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-832702023-02-28T19:32:31Z Active MEMS metamaterials for THz bandwidth control Shih, Kailing Pitchappa, Prakash Manjappa, Manukumara Ho, Chong Pei Singh, Ranjan Yang, Bin Singh, Navab Lee, Chengkuo School of Physical and Mathematical Sciences Microelectromechanical systems Metamaterials We experimentally demonstrate a microelectromechanical system (MEMS) based metamaterial with actively tunable resonance bandwidth characteristics, operating in the terahertz (THz) spectral region. The broadband resonance characteristic feature of the MEMS metamaterial is achieved by integrating sixteen microcantilever resonators of identical lengths but with continuously varying release lengths, to form a supercell. The MEMS metamaterial showed broadband resonance characteristics with a full width half maximum (FWHM) value of 175 GHz for resonators with a metal thickness of 900 nm and was further improved to 225 GHz by reducing the metal thickness to 500 nm. The FWHM resonance bandwidth of the MEMS metamaterial was actively switched to 90 GHz by electrostatically controlling the out-of-plane release height of the constituent microcantilever resonators. Furthermore, the electrically controlled resonance bandwidth allows for the active phase engineering with relatively constant intensity at a given frequency based on the reconfiguration state of the MEMS metamaterial. This enables a pathway for the realization of actively controlled transmission or reflection based on dynamically programmable THz metamaterials. NRF (Natl Research Foundation, S’pore) MOE (Min. of Education, S’pore) Published version 2017-05-29T09:26:15Z 2019-12-06T15:18:53Z 2017-05-29T09:26:15Z 2019-12-06T15:18:53Z 2017 Journal Article Shih, K., Pitchappa, P., Manjappa, M., Ho, C. P., Singh, R., Yang, B., et al. (2017). Active MEMS metamaterials for THz bandwidth control. Applied Physics Letters, 110(16), 161108-. 0003-6951 https://hdl.handle.net/10356/83270 http://hdl.handle.net/10220/42514 10.1063/1.4980115 en Applied Physics Letters © 2017 AIP Publishing. This paper was published in Applied Physics Letters and is made available as an electronic reprint (preprint) with permission of AIP Publishing. The published version is available at: [http://dx.doi.org/10.1063/1.4980115]. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law. 6 p. application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
topic Microelectromechanical systems
Metamaterials
spellingShingle Microelectromechanical systems
Metamaterials
Shih, Kailing
Pitchappa, Prakash
Manjappa, Manukumara
Ho, Chong Pei
Singh, Ranjan
Yang, Bin
Singh, Navab
Lee, Chengkuo
Active MEMS metamaterials for THz bandwidth control
description We experimentally demonstrate a microelectromechanical system (MEMS) based metamaterial with actively tunable resonance bandwidth characteristics, operating in the terahertz (THz) spectral region. The broadband resonance characteristic feature of the MEMS metamaterial is achieved by integrating sixteen microcantilever resonators of identical lengths but with continuously varying release lengths, to form a supercell. The MEMS metamaterial showed broadband resonance characteristics with a full width half maximum (FWHM) value of 175 GHz for resonators with a metal thickness of 900 nm and was further improved to 225 GHz by reducing the metal thickness to 500 nm. The FWHM resonance bandwidth of the MEMS metamaterial was actively switched to 90 GHz by electrostatically controlling the out-of-plane release height of the constituent microcantilever resonators. Furthermore, the electrically controlled resonance bandwidth allows for the active phase engineering with relatively constant intensity at a given frequency based on the reconfiguration state of the MEMS metamaterial. This enables a pathway for the realization of actively controlled transmission or reflection based on dynamically programmable THz metamaterials.
author2 School of Physical and Mathematical Sciences
author_facet School of Physical and Mathematical Sciences
Shih, Kailing
Pitchappa, Prakash
Manjappa, Manukumara
Ho, Chong Pei
Singh, Ranjan
Yang, Bin
Singh, Navab
Lee, Chengkuo
format Article
author Shih, Kailing
Pitchappa, Prakash
Manjappa, Manukumara
Ho, Chong Pei
Singh, Ranjan
Yang, Bin
Singh, Navab
Lee, Chengkuo
author_sort Shih, Kailing
title Active MEMS metamaterials for THz bandwidth control
title_short Active MEMS metamaterials for THz bandwidth control
title_full Active MEMS metamaterials for THz bandwidth control
title_fullStr Active MEMS metamaterials for THz bandwidth control
title_full_unstemmed Active MEMS metamaterials for THz bandwidth control
title_sort active mems metamaterials for thz bandwidth control
publishDate 2017
url https://hdl.handle.net/10356/83270
http://hdl.handle.net/10220/42514
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