Nguyen, N. Y., Tian, Y., Zhong, Z. W., & Engineering, S. o. M. a. A. (2016). Modeling and simulation for the distribution of slurry particles in chemical mechanical polishing.
Chicago Style CitationNguyen, N. Y., Yebing Tian, Zhao Wei Zhong, and School of Mechanical and Aerospace Engineering. Modeling and Simulation for the Distribution of Slurry Particles in Chemical Mechanical Polishing. 2016.
MLA CitationNguyen, N. Y., Yebing Tian, Zhao Wei Zhong, and School of Mechanical and Aerospace Engineering. Modeling and Simulation for the Distribution of Slurry Particles in Chemical Mechanical Polishing. 2016.
Warning: These citations may not always be 100% accurate.