Nguyen, N. Y., Tian, Y., Zhong, Z. W., & Engineering, S. o. M. a. A. (2016). Modeling and simulation for the distribution of slurry particles in chemical mechanical polishing.
استشهاد بنمط شيكاغوNguyen, N. Y., Yebing Tian, Zhao Wei Zhong, و School of Mechanical and Aerospace Engineering. Modeling and Simulation for the Distribution of Slurry Particles in Chemical Mechanical Polishing. 2016.
MLA استشهادNguyen, N. Y., Yebing Tian, Zhao Wei Zhong, و School of Mechanical and Aerospace Engineering. Modeling and Simulation for the Distribution of Slurry Particles in Chemical Mechanical Polishing. 2016.
تحذير: قد لا تكون هذه الاستشهادات دائما دقيقة بنسبة 100%.