Nguyen, N. Y., Tian, Y., Zhong, Z. W., & Engineering, S. o. M. a. A. (2016). Modeling and simulation for the distribution of slurry particles in chemical mechanical polishing.
Chicago Style CitationNguyen, N. Y., Yebing Tian, Zhao Wei Zhong, and School of Mechanical and Aerospace Engineering. Modeling and Simulation for the Distribution of Slurry Particles in Chemical Mechanical Polishing. 2016.
MLA引文Nguyen, N. Y., Yebing Tian, Zhao Wei Zhong, and School of Mechanical and Aerospace Engineering. Modeling and Simulation for the Distribution of Slurry Particles in Chemical Mechanical Polishing. 2016.
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