Pulsed laser deposition of epitaxial MgO buffer layer for proton-conducting ceramic electrolytes

• Main Authors: Li, Yong, Wong, Lai Mun, Xie, Hanlin, Wang, Shijie, Su, Pei-Chen
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2017
• Subjects: Pulsed Laser Deposition (PLD); Epitaxial MgO Thin Film
• Online Access: https://hdl.handle.net/10356/86067; http://hdl.handle.net/10220/43928
• Institution: Nanyang Technological University

This work studies the deposition of epitaxial MgO thin films with thickness of 40 nm deposited on bare Si (100) wafer using pulsed laser deposition (PLD), which can serve as a buffer layer for subsequent growth of textured Y-BaZrO3 with high proton-conductivity. The success of epitaxial deposition w...