Ink-Jet Printing of Micro-Electro-Mechanical Systems (MEMS)

• Main Authors: Lau, Gih-Keong, Shrestha, Milan
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2017
• Subjects: Inkjet printing; Micro-electro-mechanical systems
• Online Access: https://hdl.handle.net/10356/86520; http://hdl.handle.net/10220/44052
• Institution: Nanyang Technological University

Beyond printing text on paper, inkjet printing methods have recently been applied to print passive electrical and optical microparts, such as conductors, resistors, solder bumps and polymeric micro lenses. They are also useful to print micro-electro-mechanical systems (MEMS) as sub-millimeter sensor...