Tuning electro-optic susceptibity via strain engineering in artificial PZT multilayer films for high-performance broadband modulator

• Main Authors: Zhu, Minmin, Du, Zehui, Li, Hongling, Chen, Bensong, Jing, Lin, Tay, Roland Ying Jie, Lin, Jinjun, Tsang, Siu Hon, Teo, Edwin Hang Tong
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2017
• Subjects: PZT; Multilayer
• Online Access: https://hdl.handle.net/10356/86853; http://hdl.handle.net/10220/44196
• Institution: Nanyang Technological University

A series of Pb(Zr1-xTix)O3 multilayer films alternatively stacked by Pb(Zr0.52Ti0.48)O3 and Pb(Zr0.35Ti0.65)O3 layers have been deposited on corning glass by magnetron sputtering. The films demonstrate pure perovskite structure and good crystallinity. A large tetragonality (c/a) of ∼1.061 and a shif...