Vertically self-ordered orientation of nanocrystalline hexagonal boron nitride thin films for enhanced thermal characteristics
Vertically self-ordered hexagonal boron nitride (ordered h-BN) is a highly ordered turbostratic BN (t-BN) material similar to hexagonal BN, with its planar structure perpendicularly oriented to the substrate. The ordered h-BN thin films were grown using a High Power Impulse Magnetron Sputtering (HiP...
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sg-ntu-dr.10356-872052020-06-01T10:26:48Z Vertically self-ordered orientation of nanocrystalline hexagonal boron nitride thin films for enhanced thermal characteristics Cometto, Olivier Sun, Bo Tsang, Siu Hon Huang, Xi Koh, Yee Kan Teo, Edwin Hang Tong School of Electrical and Electronic Engineering School of Materials Science & Engineering CNRS International NTU THALES Research Alliances Hexagonal Boron Nitride Thin Film Vertically self-ordered hexagonal boron nitride (ordered h-BN) is a highly ordered turbostratic BN (t-BN) material similar to hexagonal BN, with its planar structure perpendicularly oriented to the substrate. The ordered h-BN thin films were grown using a High Power Impulse Magnetron Sputtering (HiPIMS) system with a lanthanum hexaboride (LaB6) target reactively sputtered in nitrogen gas. The best vertical alignment was obtained at room temperature, with a grounded bias and a HiPIMS peak power density of 60 W cm−2. Even though the film contains up to 7.5 at% lanthanum, it retains its highly insulative properties and it was observed that an increase in compressive stress is correlated to an increase in film ordering quality. Importantly, the thermal conductivity of vertically ordered h-BN is considerably high at 5.1 W m−1 K−1. The favourable thermal conductivity coupled with the dielectric properties of this novel material and the low temperature growth could outperform SiO2 in high power density electronic applications. ASTAR (Agency for Sci., Tech. and Research, S’pore) MOE (Min. of Education, S’pore) 2018-07-26T08:41:44Z 2019-12-06T16:37:12Z 2018-07-26T08:41:44Z 2019-12-06T16:37:12Z 2015 Journal Article Cometto, O., Sun, B., Tsang, S. H., Huang, X., Koh, Y. K., & Teo, E. H. T. (2015). Vertically self-ordered orientation of nanocrystalline hexagonal boron nitride thin films for enhanced thermal characteristics. Nanoscale, 7(45), 18984-18991. 2040-3364 https://hdl.handle.net/10356/87205 http://hdl.handle.net/10220/45268 10.1039/C5NR05009J en Nanoscale © 2015 The Royal Society of Chemistry. |
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Hexagonal Boron Nitride Thin Film Cometto, Olivier Sun, Bo Tsang, Siu Hon Huang, Xi Koh, Yee Kan Teo, Edwin Hang Tong Vertically self-ordered orientation of nanocrystalline hexagonal boron nitride thin films for enhanced thermal characteristics |
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Vertically self-ordered hexagonal boron nitride (ordered h-BN) is a highly ordered turbostratic BN (t-BN) material similar to hexagonal BN, with its planar structure perpendicularly oriented to the substrate. The ordered h-BN thin films were grown using a High Power Impulse Magnetron Sputtering (HiPIMS) system with a lanthanum hexaboride (LaB6) target reactively sputtered in nitrogen gas. The best vertical alignment was obtained at room temperature, with a grounded bias and a HiPIMS peak power density of 60 W cm−2. Even though the film contains up to 7.5 at% lanthanum, it retains its highly insulative properties and it was observed that an increase in compressive stress is correlated to an increase in film ordering quality. Importantly, the thermal conductivity of vertically ordered h-BN is considerably high at 5.1 W m−1 K−1. The favourable thermal conductivity coupled with the dielectric properties of this novel material and the low temperature growth could outperform SiO2 in high power density electronic applications. |
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School of Electrical and Electronic Engineering |
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School of Electrical and Electronic Engineering Cometto, Olivier Sun, Bo Tsang, Siu Hon Huang, Xi Koh, Yee Kan Teo, Edwin Hang Tong |
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Article |
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Cometto, Olivier Sun, Bo Tsang, Siu Hon Huang, Xi Koh, Yee Kan Teo, Edwin Hang Tong |
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Cometto, Olivier |
title |
Vertically self-ordered orientation of nanocrystalline hexagonal boron nitride thin films for enhanced thermal characteristics |
title_short |
Vertically self-ordered orientation of nanocrystalline hexagonal boron nitride thin films for enhanced thermal characteristics |
title_full |
Vertically self-ordered orientation of nanocrystalline hexagonal boron nitride thin films for enhanced thermal characteristics |
title_fullStr |
Vertically self-ordered orientation of nanocrystalline hexagonal boron nitride thin films for enhanced thermal characteristics |
title_full_unstemmed |
Vertically self-ordered orientation of nanocrystalline hexagonal boron nitride thin films for enhanced thermal characteristics |
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vertically self-ordered orientation of nanocrystalline hexagonal boron nitride thin films for enhanced thermal characteristics |
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2018 |
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https://hdl.handle.net/10356/87205 http://hdl.handle.net/10220/45268 |
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