Tailoring the structural and magnetic properties of masked CoPt thin films using ion implantation

• Main Authors: Kumar, Durgesh, Gupta, Surbhi, Jin, Tianli, Nongjai, R., Asokan, K., Piramanayagam, S. N.
• Other Authors: School of Physical and Mathematical Sciences
• Format: Article
• Language: English
• Published: 2018
• Subjects: Ion; Condensed Matter Properties
• Online Access: https://hdl.handle.net/10356/87269; http://hdl.handle.net/10220/44368
• Institution: Nanyang Technological University

The effects of ion implantations through a mask on the structural and magnetic properties of Co80Pt20 films were investigated. The mask was patterned using the self-assembly of diblock copolymers. For implantation, high (40 keV for 14N+ and 100 keV for 40Ar+) and low (7.5 keV for 14N+ and 4.5 keV fo...