Effects of substrate bias on tribological properties of diamondlike carbon thin films deposited via microwave-excited plasma-enhanced chemical vapor deposition

• Main Authors: Neville, Anne, Kolev, Ivan, Zhao, Hongyuan, Khun, Nay Win
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2018
• Subjects: DRNTU::Engineering::Mechanical engineering; Microwave-excited Plasma-enhanced CVD; DLC Film
• Online Access: https://hdl.handle.net/10356/87844; http://hdl.handle.net/10220/46853
• Institution: Nanyang Technological University

In this study, the structure and tribological performance of the diamondlike carbon (DLC) films were related to deposition parameters. The feasibility of the microwave-excited plasma-enhanced chemical vapor deposition (μW-PECVD) as a process to produce good quality DLC films was the focus. The DLC f...