Electroosmotic flow in microchannel with black silicon nanostructures

Although electroosmotic flow (EOF) has been applied to drive fluid flow in microfluidic chips, some of the phenomena associated with it can adversely affect the performance of certain applications such as electrophoresis and ion preconcentration. To minimize the undesirable effects, EOF can be suppr...

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Main Authors: Lim, An Eng, Lim, Chun Yee, Lam, Yee Cheong, Taboryski, Rafael
Other Authors: School of Mechanical and Aerospace Engineering
Format: Article
Language:English
Published: 2018
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Online Access:https://hdl.handle.net/10356/89013
http://hdl.handle.net/10220/44852
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-890132023-03-04T17:16:12Z Electroosmotic flow in microchannel with black silicon nanostructures Lim, An Eng Lim, Chun Yee Lam, Yee Cheong Taboryski, Rafael School of Mechanical and Aerospace Engineering Reactive Ion Etching Micro-/nanofabrication Although electroosmotic flow (EOF) has been applied to drive fluid flow in microfluidic chips, some of the phenomena associated with it can adversely affect the performance of certain applications such as electrophoresis and ion preconcentration. To minimize the undesirable effects, EOF can be suppressed by polymer coatings or introduction of nanostructures. In this work, we presented a novel technique that employs the Dry Etching, Electroplating and Molding (DEEMO) process along with reactive ion etching (RIE), to fabricate microchannel with black silicon nanostructures (prolate hemispheroid-like structures). The effect of black silicon nanostructures on EOF was examined experimentally by current monitoring method, and numerically by finite element simulations. The experimental results showed that the EOF velocity was reduced by 13 ± 7%, which is reasonably close to the simulation results that predict a reduction of approximately 8%. EOF reduction is caused by the distortion of local electric field at the nanostructured surface. Numerical simulations show that the EOF velocity decreases with increasing nanostructure height or decreasing diameter. This reveals the potential of tuning the etching process parameters to generate nanostructures for better EOF suppression. The outcome of this investigation enhances the fundamental understanding of EOF behavior, with implications on the precise EOF control in devices utilizing nanostructured surfaces for chemical and biological analyses. Published version 2018-05-22T03:05:33Z 2019-12-06T17:15:54Z 2018-05-22T03:05:33Z 2019-12-06T17:15:54Z 2018 2018 Journal Article Lim, A. E., Lim, C. Y., Lam, Y. C., & Taboryski, R. (2018). Electroosmotic Flow in Microchannel with Black Silicon Nanostructures. Micromachines, 9(5), 229-. https://hdl.handle.net/10356/89013 http://hdl.handle.net/10220/44852 10.3390/mi9050229 207788 en Micromachines © 2018 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). 19 p. application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
topic Reactive Ion Etching
Micro-/nanofabrication
spellingShingle Reactive Ion Etching
Micro-/nanofabrication
Lim, An Eng
Lim, Chun Yee
Lam, Yee Cheong
Taboryski, Rafael
Electroosmotic flow in microchannel with black silicon nanostructures
description Although electroosmotic flow (EOF) has been applied to drive fluid flow in microfluidic chips, some of the phenomena associated with it can adversely affect the performance of certain applications such as electrophoresis and ion preconcentration. To minimize the undesirable effects, EOF can be suppressed by polymer coatings or introduction of nanostructures. In this work, we presented a novel technique that employs the Dry Etching, Electroplating and Molding (DEEMO) process along with reactive ion etching (RIE), to fabricate microchannel with black silicon nanostructures (prolate hemispheroid-like structures). The effect of black silicon nanostructures on EOF was examined experimentally by current monitoring method, and numerically by finite element simulations. The experimental results showed that the EOF velocity was reduced by 13 ± 7%, which is reasonably close to the simulation results that predict a reduction of approximately 8%. EOF reduction is caused by the distortion of local electric field at the nanostructured surface. Numerical simulations show that the EOF velocity decreases with increasing nanostructure height or decreasing diameter. This reveals the potential of tuning the etching process parameters to generate nanostructures for better EOF suppression. The outcome of this investigation enhances the fundamental understanding of EOF behavior, with implications on the precise EOF control in devices utilizing nanostructured surfaces for chemical and biological analyses.
author2 School of Mechanical and Aerospace Engineering
author_facet School of Mechanical and Aerospace Engineering
Lim, An Eng
Lim, Chun Yee
Lam, Yee Cheong
Taboryski, Rafael
format Article
author Lim, An Eng
Lim, Chun Yee
Lam, Yee Cheong
Taboryski, Rafael
author_sort Lim, An Eng
title Electroosmotic flow in microchannel with black silicon nanostructures
title_short Electroosmotic flow in microchannel with black silicon nanostructures
title_full Electroosmotic flow in microchannel with black silicon nanostructures
title_fullStr Electroosmotic flow in microchannel with black silicon nanostructures
title_full_unstemmed Electroosmotic flow in microchannel with black silicon nanostructures
title_sort electroosmotic flow in microchannel with black silicon nanostructures
publishDate 2018
url https://hdl.handle.net/10356/89013
http://hdl.handle.net/10220/44852
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