A thermal study of amorphous and textured carbon and carbon nitride thin films via transient grating spectroscopy

• Main Authors: Cometto, Olivier, Dennett, Cody A., Tsang, Siu Hon, Short, Michael P., Teo, Edwin Hang Tong
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2018
• Subjects: Carbon Nitride; HiPIMS
• Online Access: https://hdl.handle.net/10356/89517; http://hdl.handle.net/10220/44975
• Institution: Nanyang Technological University

In this study, we are considering a novel way of growing carbon nitride (CN) films by using High Power Impulse Magnetron Sputtering (HiPIMS). Carbon and CN thin films were grown on silicon substrate with varying nanocrystalline texturing: some samples were amorphous while others were either nanocrys...