Subwavelength metrology of Al wire grating employing finite difference time domain method and Mueller matrix polarimeter

Subwavelength metrology of Al wire grating employing finite difference time domain method and Mueller matrix polarimeter

Wire grid polarizers (WGP), are sub-wavelength gratings with applications in display projection system due to their compact size, wide field of view and long-term stability. Measurement and testing of these structures are important to optimize their use. This is done by first measuring the Mueller M...

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Main Authors: Adhikari, Achyut, Dev, Kapil, Asundi, Anand
Other Authors: Creath, Katherine
Format: Conference or Workshop Item
Language:English
Published: 2018
Subjects:
DRNTU::Engineering::Mechanical engineering
Scanning Electron Microscopy (SEM)
Wire Grid Polarizers (WGP)
Online Access:https://hdl.handle.net/10356/90175
http://hdl.handle.net/10220/47214
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-901752023-03-04T17:08:13Z Subwavelength metrology of Al wire grating employing finite difference time domain method and Mueller matrix polarimeter Adhikari, Achyut Dev, Kapil Asundi, Anand Creath, Katherine Burke, Jan Albertazzi Gonçalves, Armando School of Mechanical and Aerospace Engineering Interferometry XVIII Centre for Optical and Laser Engineering DRNTU::Engineering::Mechanical engineering Scanning Electron Microscopy (SEM) Wire Grid Polarizers (WGP) Wire grid polarizers (WGP), are sub-wavelength gratings with applications in display projection system due to their compact size, wide field of view and long-term stability. Measurement and testing of these structures are important to optimize their use. This is done by first measuring the Mueller Matrix of the WGP using a Mueller Matrix Polarimeter. Next the Finite Difference Time Domain (FDTD) method is used to simulate a similar Mueller matrix thus providing the period and step height of the WGP. This approach may lead to more generic determination of sub-wavelength structures including diffractive optical structures. Published version 2018-12-26T08:12:26Z 2019-12-06T17:42:24Z 2018-12-26T08:12:26Z 2019-12-06T17:42:24Z 2016 Conference Paper Adhikari, A., Dev, K., & Asundi, A. (2016). Subwavelength metrology of Al wire grating employing finite difference time domain method and Mueller matrix polarimeter. Interferometry XVIII, 9960, 99600F-. doi:10.1117/12.2240639 https://hdl.handle.net/10356/90175 http://hdl.handle.net/10220/47214 10.1117/12.2240639 en © 2016 Society of Photo-optical Instrumentation Engineers (SPIE). This paper was published in Interferometry XVIII and is made available as an electronic reprint (preprint) with permission of Society of Photo-optical Instrumentation Engineers (SPIE). The published version is available at: [http://dx.doi.org/10.1117/12.2240639]. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law. 11 p. application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
topic DRNTU::Engineering::Mechanical engineering
Scanning Electron Microscopy (SEM)
Wire Grid Polarizers (WGP)
spellingShingle DRNTU::Engineering::Mechanical engineering
Scanning Electron Microscopy (SEM)
Wire Grid Polarizers (WGP)
Adhikari, Achyut
Dev, Kapil
Asundi, Anand
Subwavelength metrology of Al wire grating employing finite difference time domain method and Mueller matrix polarimeter
description Wire grid polarizers (WGP), are sub-wavelength gratings with applications in display projection system due to their compact size, wide field of view and long-term stability. Measurement and testing of these structures are important to optimize their use. This is done by first measuring the Mueller Matrix of the WGP using a Mueller Matrix Polarimeter. Next the Finite Difference Time Domain (FDTD) method is used to simulate a similar Mueller matrix thus providing the period and step height of the WGP. This approach may lead to more generic determination of sub-wavelength structures including diffractive optical structures.
author2 Creath, Katherine
author_facet Creath, Katherine
Adhikari, Achyut
Dev, Kapil
Asundi, Anand
format Conference or Workshop Item
author Adhikari, Achyut
Dev, Kapil
Asundi, Anand
author_sort Adhikari, Achyut
title Subwavelength metrology of Al wire grating employing finite difference time domain method and Mueller matrix polarimeter
title_short Subwavelength metrology of Al wire grating employing finite difference time domain method and Mueller matrix polarimeter
title_full Subwavelength metrology of Al wire grating employing finite difference time domain method and Mueller matrix polarimeter
title_fullStr Subwavelength metrology of Al wire grating employing finite difference time domain method and Mueller matrix polarimeter
title_full_unstemmed Subwavelength metrology of Al wire grating employing finite difference time domain method and Mueller matrix polarimeter
title_sort subwavelength metrology of al wire grating employing finite difference time domain method and mueller matrix polarimeter
publishDate 2018
url https://hdl.handle.net/10356/90175
http://hdl.handle.net/10220/47214
_version_ 1759858116446388224

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