The use of circular optical grating for measuring angular rotation of mirrors
This paper explores the feasible use of circular optical grating for measuring the rotation of mirrors that are commonly found in micro-systems. Both theoretical and experimental results show that distortion of the circular grating that is projected onto the mirror surface is a simple function of...
Saved in:
| Main Authors: | , , , , |
|---|---|
| 其他作者: | |
| 格式: | Article |
| 語言: | English |
| 出版: |
2011
|
| 主題: | |
| 在線閱讀: | https://hdl.handle.net/10356/91296 http://hdl.handle.net/10220/6701 |
| 標簽: |
添加標簽
沒有標簽, 成為第一個標記此記錄!
|
| 機構: | Nanyang Technological University |
| 語言: | English |