Light-induced instability in current conduction of aluminum nitride thin films embedded with Al nanocrystals

• Main Authors: Liu, Zhen, Chen, Tupei, Liu, Yang, Ding, Liang, Yang, Ming, Wong, Jen It, Cen, Zhan Hong, Li, Yibin, Zhang, Sam, Fung, Stevenson Hon Yuen
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2010
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics
• Online Access: https://hdl.handle.net/10356/91842; http://hdl.handle.net/10220/6402
• Institution: Nanyang Technological University

Al nanocrystals (nc-Al) embedded in AlN thin films have been synthesized by rf magnetron sputtering. The influence of ultraviolet (UV) illumination on electrical characteristics of the nc-Al/AlN thin film system has been investigated. It is shown that the UV illumination could lead to a random chang...