Study of direct nanoimprinting processes by molecular dynamics simulations

• Main Authors: Pei, Qing Xiang, Liu, Zi Shun, Zhang, Yong Wei, Dong, Zhili
• Other Authors: School of Materials Science & Engineering
• Format: Article
• Language: English
• Published: 2012
• Subjects: DRNTU::Engineering::Materials
• Online Access: https://hdl.handle.net/10356/93863; http://hdl.handle.net/10220/7632
• Institution: Nanyang Technological University

The direct nanoimprinting process between a diamond mold and a copper substrate is studied using molecular dynamics simulations with embedded atom method potential. The deformation behavior, dislocation movement and imprint force are investigated. For the three imprint surfaces of (0 0 1), (1 1 0) a...