Compact handheld digital holographic microscopy system development

Development of a commercial prototype of reflection handheld digital holographic microscope system is presented in this paper. The concept is based on lensless magnification using diverging wave geometry and the miniaturized optical design which provides a compact packaged system. The optical geomet...

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Main Authors: Sui, Liansheng, Singh, Vijay Raj, Anand, Asundi
Other Authors: School of Mechanical and Aerospace Engineering
Format: Conference or Workshop Item
Language:English
Published: 2011
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Online Access:https://hdl.handle.net/10356/94090
http://hdl.handle.net/10220/7236
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-940902023-03-04T17:07:52Z Compact handheld digital holographic microscopy system development Sui, Liansheng Singh, Vijay Raj Anand, Asundi School of Mechanical and Aerospace Engineering International Conference on Experimental Mechanics (4th : 2009 : Singapore) National Research Foundation Singapore DRNTU::Science::Physics::Optics and light Development of a commercial prototype of reflection handheld digital holographic microscope system is presented in this paper. The concept is based on lensless magnification using diverging wave geometry and the miniaturized optical design which provides a compact packaged system. The optical geometry design provides the same curvature of object and reference waves and thus phase aberration is automatically compensated. The basic methodology of the system is developed and it further explored for 3D imaging, static deflection and vibration measurements applications. Based on the developed methodology an user-friendly software is developed suitable for industrial shop floor environment. The applications of the system are presented for 3D imaging, static deflection measurement and vibration analysis of MEMS samples. The developed system is well suitable for the testing of MEMS and Microsystems samples, with full-field and real-time features, for static and dynamic inspection and characterization and to monitor micro-fabrication process. Accepted version 2011-10-12T03:39:25Z 2019-12-06T18:50:27Z 2011-10-12T03:39:25Z 2019-12-06T18:50:27Z 2009 2009 Conference Paper Sui, L., Singh, V. R., & Anand, A. (2009). Compact handheld digital holographic microscopy system development. International Conference on Experimental Mechanics. https://hdl.handle.net/10356/94090 http://hdl.handle.net/10220/7236 10.1117/12.851421 148394 en © 2009 SPIE.  This is the author created version of a work that has been peer reviewed and accepted for publication by International Conference on Experimental Mechanics, SPIE.  It incorporates referee’s comments but changes resulting from the publishing process, such as copyediting, structural formatting, may not be reflected in this document. The published version is available at: http://dx.doi.org/10.1117/12.851421. 10 p. application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
topic DRNTU::Science::Physics::Optics and light
spellingShingle DRNTU::Science::Physics::Optics and light
Sui, Liansheng
Singh, Vijay Raj
Anand, Asundi
Compact handheld digital holographic microscopy system development
description Development of a commercial prototype of reflection handheld digital holographic microscope system is presented in this paper. The concept is based on lensless magnification using diverging wave geometry and the miniaturized optical design which provides a compact packaged system. The optical geometry design provides the same curvature of object and reference waves and thus phase aberration is automatically compensated. The basic methodology of the system is developed and it further explored for 3D imaging, static deflection and vibration measurements applications. Based on the developed methodology an user-friendly software is developed suitable for industrial shop floor environment. The applications of the system are presented for 3D imaging, static deflection measurement and vibration analysis of MEMS samples. The developed system is well suitable for the testing of MEMS and Microsystems samples, with full-field and real-time features, for static and dynamic inspection and characterization and to monitor micro-fabrication process.
author2 School of Mechanical and Aerospace Engineering
author_facet School of Mechanical and Aerospace Engineering
Sui, Liansheng
Singh, Vijay Raj
Anand, Asundi
format Conference or Workshop Item
author Sui, Liansheng
Singh, Vijay Raj
Anand, Asundi
author_sort Sui, Liansheng
title Compact handheld digital holographic microscopy system development
title_short Compact handheld digital holographic microscopy system development
title_full Compact handheld digital holographic microscopy system development
title_fullStr Compact handheld digital holographic microscopy system development
title_full_unstemmed Compact handheld digital holographic microscopy system development
title_sort compact handheld digital holographic microscopy system development
publishDate 2011
url https://hdl.handle.net/10356/94090
http://hdl.handle.net/10220/7236
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