Magnetron sputtered TiO2 films on a stainless steel substrate : selective rutile phase formation and its tribological and anti-corrosion performance

• المؤلفون الرئيسيون: Krishna, Dangeti Siva Rama, Sun, Yong, Chen, Zhong
• مؤلفون آخرون: School of Materials Science & Engineering
• التنسيق: مقال
• اللغة: English
• منشور في: 2012
• الموضوعات: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/94152; http://hdl.handle.net/10220/8172
• المؤسسة: Nanyang Technological University

In this work, TiO2 films on 316L stainless steel have been formed by non-reactive magnetron sputtering of TiO2 target. The effect of a titanium underlayer on the crystalline phase of the TiO2 film has been investigated in terms of phase evolution, film morphology, corrosion resistance, adhesion stre...