Proposal for micromachined accelerometer, based on a contactless suspension with zero spring constant

• Main Authors: Poletkin, Kirill V., Chernomorsky, Alexsandr I., Shearwood, Christopher
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2012
• Subjects: DRNTU::Engineering::Electrical and electronic engineering; DRNTU::Engineering::Aeronautical engineering
• Online Access: https://hdl.handle.net/10356/94311; http://hdl.handle.net/10220/7917
• Institution: Nanyang Technological University

In this paper, a micromachined accelerometer, based on a contactless suspension with a zero spring constant which is a new challenge that provides possibility to significantly increasing accuracies of the micromachined inertial sensor is proposed. Minimization of the spring constant of the contactle...