Proposal for micromachined accelerometer, based on a contactless suspension with zero spring constant

• المؤلفون الرئيسيون: Poletkin, Kirill V., Chernomorsky, Alexsandr I., Shearwood, Christopher
• مؤلفون آخرون: School of Mechanical and Aerospace Engineering
• التنسيق: مقال
• اللغة: English
• منشور في: 2012
• الموضوعات: DRNTU::Engineering::Electrical and electronic engineering; DRNTU::Engineering::Aeronautical engineering
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/94311; http://hdl.handle.net/10220/7917
• المؤسسة: Nanyang Technological University

In this paper, a micromachined accelerometer, based on a contactless suspension with a zero spring constant which is a new challenge that provides possibility to significantly increasing accuracies of the micromachined inertial sensor is proposed. Minimization of the spring constant of the contactle...