Polymer pen lithography

We report a low-cost, high-throughput scanning probe lithography method that uses a soft elastomeric tip array, rather than tips mounted on individual cantilevers, to deliver inks to a surface in a “direct write” manner. Polymer pen lithography merges the feature size control of dip-pen nanolithogra...

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Bibliographic Details
Main Authors: Giam, Louise R., Mirkin, Chad A., Huo, Fengwei, Zheng, Zijian, Zheng, Gengfeng, Zhang, Hua
Other Authors: School of Materials Science & Engineering
Format: Article
Language:English
Published: 2012
Subjects:
Online Access:https://hdl.handle.net/10356/94822
http://hdl.handle.net/10220/8553
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Institution: Nanyang Technological University
Language: English