A nano-opto-mechanical pressure sensor via ring resonator

• Main Authors: Zhao, X., Tsai, J. M., Cai, H., Ji, X. M., Zhou, J., Bao, M. H., Huang, Y. P., Liu, Ai Qun., Kwong, Dim Lee.
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
• Online Access: https://hdl.handle.net/10356/95386; http://hdl.handle.net/10220/9323
• Institution: Nanyang Technological University

This paper reports a nano-opto-mechanical pressure sensor based on nano-scaled ring resonator. The pressure is measured through the output spectrum shift which is induced via mechanical deformation of the ring resonator. The sensitivity as high as 1.47 pm/kPa has been experimentally achieved which a...