Compact piezoelectric micromotor with a single bulk lead zirconate titanate stator

• Main Authors: Yan, Liang, Lan, Hua, Jiao, Zongxia, Chen, Chin-Yin, Chen, I-Ming
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
• Online Access: https://hdl.handle.net/10356/96544; http://hdl.handle.net/10220/9886
• Institution: Nanyang Technological University

The advance of micro/nanotechnology promotes the development of micromotors in recent years. In this article, a compact piezoelectric ultrasonic micromotor with a single bulk lead zirconate titanate stator is proposed. A traveling wave is generated by superposition of bending modes with 90 phase difference excited by d15 inverse piezoelectric effects. The operating principle simplifies the system structure significantly, and provides a miniaturization solution. A research prototype with the size of 0.75x0.75x1.55mm is developed. It can produce start-up torque of 0.27uNmand maximum speed of 2760 r/min at 14RMS.